1/20/2010	9:50:44 AM	Bypass valve closed
1/20/2010	9:50:44 AM	Main Vac valve closed
1/20/2010	9:50:50 AM	Bypass valve opened
1/20/2010	9:50:50 AM	Main Vac valve opened
1/20/2010	9:51:35 AM	Bypass valve closed
1/20/2010	9:51:36 AM	Main Vac valve closed
1/20/2010	9:51:37 AM	Bypass valve opened
1/20/2010	9:51:42 AM	Bypass solenoid MFC set to  760.000000
1/20/2010	9:52:32 AM	Helium valve opened
1/20/2010	9:52:36 AM	Helium valve closed
1/20/2010	9:52:39 AM	Helium valve opened
1/20/2010	9:52:43 AM	Helium valve closed
1/20/2010	9:52:53 AM	Helium valve opened
1/20/2010	9:53:00 AM	Helium valve closed
1/20/2010	9:53:00 AM	Bypass valve closed
1/20/2010	10:02:51 AM	Bypass solenoid MFC set to  0.000000
1/20/2010	10:02:55 AM	Bypass valve opened
1/20/2010	10:03:35 AM	Bypass valve closed
1/20/2010	10:09:54 AM	Bypass valve opened
1/20/2010	10:10:34 AM	Main Vac valve opened
1/20/2010	10:14:29 AM	Bypass valve closed
1/20/2010	10:14:29 AM	Main Vac valve closed
1/20/2010	10:14:39 AM	Bypass valve opened
1/20/2010	10:14:39 AM	Main Vac valve opened
1/20/2010	10:14:59 AM	Helium valve opened
1/20/2010	10:18:34 AM	Helium valve closed
1/20/2010	10:32:04 AM	Main Vac valve closed
1/20/2010	10:32:07 AM	Bypass valve closed
1/20/2010	10:32:16 AM	Bypass valve opened
1/20/2010	10:32:18 AM	Main Vac valve opened
1/20/2010	10:34:04 AM	Main Vac valve closed
1/20/2010	10:34:12 AM	Bypass solenoid MFC set to  760.000000
1/20/2010	10:34:23 AM	Helium valve opened
1/20/2010	10:35:47 AM	Bypass valve closed
1/20/2010	10:58:46 AM	H2 valve opened
1/20/2010	10:59:18 AM	SiCl4 pre valve opened
1/20/2010	10:59:19 AM	SiCl4 post valve opened
1/20/2010	10:59:36 AM	Helium valve closed
1/20/2010	11:22:56 AM	SiCl4 post valve closed
1/20/2010	11:22:57 AM	SiCl4 pre valve closed
1/20/2010	11:23:10 AM	H2 valve closed
1/20/2010	11:23:14 AM	Helium valve opened
1/20/2010	11:58:10 AM	Bypass solenoid MFC set to  0.000000
1/20/2010	11:58:18 AM	Bypass valve opened
1/20/2010	11:58:19 AM	Helium valve closed
1/20/2010	11:58:29 AM	Helium valve opened
1/20/2010	11:58:32 AM	Helium valve closed
1/20/2010	11:59:16 AM	Bypass solenoid MFC set to  760.000000
1/20/2010	11:59:25 AM	Helium valve opened
1/20/2010	11:59:25 AM	Helium valve closed
1/20/2010	11:59:26 AM	Helium valve opened
1/20/2010	11:59:39 AM	Helium valve closed
1/20/2010	11:59:47 AM	Bypass valve closed
1/20/2010	12:00:12 PM	Helium valve opened
1/20/2010	12:00:19 PM	Helium valve closed
1/20/2010	12:00:30 PM	Helium valve opened
1/20/2010	12:00:40 PM	Helium valve closed
1/20/2010	12:35:26 PM	Main Vac valve opened
1/20/2010	12:35:26 PM	Main Vac valve closed
1/20/2010	12:35:26 PM	Main Vac valve opened
1/20/2010	12:35:27 PM	Main Vac valve closed
1/20/2010	12:35:34 PM	Main Vac valve opened
1/20/2010	12:43:28 PM	Bypass valve opened
1/20/2010	12:43:29 PM	Bypass valve closed
1/20/2010	12:44:28 PM	Main Vac valve closed
1/20/2010	12:44:49 PM	Bypass valve opened
1/20/2010	1:37:38 PM	Bypass valve closed
1/20/2010	1:37:43 PM	Bypass valve opened
